IEEE

A New Scheduling Approach to Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools Concurrently Processing Multivariety Wafers

Abstract: In the periodic scheduling problems of a dual-arm wafer-residency-time-constrained (W-R-T-C) cluster tool (CT) with multivariety wafers, it is important to balance workload at each step.
New Electronics

Imec and EV Group showcase advances in wafer-to-wafer hybrid bonding

Imec and semiconductor equipment supplier EV Group (EVG) have demonstrated a wafer-to-wafer hybrid bonding process capable of achieving a 200-nanometre copper interconnect pitch, marking a step ...
IEEE

Development of a Wafer-Embeddable Microwave Patch Antenna Sensor for Plasma Diagnostics in Semiconductor Processing

Abstract: In this study, we present a microstrip-based microwave patch antenna sensor (MPAS) that can be embedded into a wafer to measure plasma on the wafer without bulky coaxial architectures.
POWER Magazine

Fives ProSim Launches ProSimPlus Python API, a New Generation of Python Driven Process Simulation

Fives ProSim, a subsidiary of the Fives Group and an expert in industrial process simulation and optimization, announces the release of ProSimPlus Python API. This new solution enables users to run ...
Mena FN

JST Enhances Applications Lab With New Wafer Wet Processing Equipment

(MENAFN- EIN Presswire) EINPresswire/ -- JST, a leading provider of wet benches, wafer cleaning and processing tools for the semiconductor industry, today announced new additions and upgrades to its ...