This video shows the functioning of Nanometrics’ RPMBlue-FS, photoluminescence (PL) mapping tool that can be fixed with a robotic wafer handler when required. This PL mapping system has a ...
This video demonstrates the functioning of the RPMBlue-FS photoluminescence (PL) mapping system from Nanometrics. This PL mapping tool can also be fitted with a robotic handler when required. It can ...